In the ISP3.pdf, i found
"Wrong Device ID
a. The voltage of the target is too high or too low (see below)
b. Wrong device selected
c. Chip defective
It is possible that a device ID in the target is permanently destroyed, but the device works correct
If it is the correct CPU-type the programming can be continued.
All the above problems can also be a problem of a defective programmer. In many cases the Reset Pin is
loaded with Rs and/or Cs. In this case the activated Push-Pull Reset can help.
If a CPU shows a wrong device ID at programming, nevertheless one can continue with programming.
"
But it doesn't help me..